1200C Max Three Zone Quartz Tube Furnace with 3 Channel Gas Mixer, Vacuum Pump

Description：

KJ-1200X-80-III is a CE certified splitable three zones Tube furnace with mechanical vacuum pump & digital vacuum guage and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix 1-3 type of gases for CVD or diffusion.

Specific Introduction:
KJ-1200X-80-III is a CE certified splitable three zones Tube furnace with mechanical vacuum pump & digital vacuum guage and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix 1-3 type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.
Parameters:

Furnace Construction	Double layer steel casing with air cooling High purity alumina fiber insulation for max. energy saving Splitable cover for easy tube replacement
Maximum Temperature	1200°C
ContinuousTemperature	1100°C
Maximum Heating Rate	≤ 20°C /min
Heating Zone Length	Three zones: (880mm, 35" in total) Zone 1: 220mm (8.6" ) Zone 2: 440mm (17.3") Zone 3: 220 mm (8.6")
Constant Temperature Zone	If three zones are set at the same temperature, constant temperature zone is 25" (625 mm) long with a temperature discrepancy of +/- 1oC. If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1oC.
Temperature Accuracy	±1°C
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Temperature Controller	Three precision temperature controllers to control three zones separately. PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built in overheating & broken thermocouple protection. Over temperature protection and alarm allows for operation without attendant(s). ±1°C temperature accuracy. RS485 Communications Port. Optional: The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at extra cost. The new version of PC module is now compatible with Lab View 05/08/2014 If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems.
Quartz Tube& Sealing Flanges	80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube included. Vacuum flanges with valves and pressure gauge are included. Thermal block must be placed inside tube.
Vacuum Sensor & Display	Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases. Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
Sliding Flange with Sample Holder	Slide for transferring sample (manual operated)
Vacuum Sealing Flanges	Two stainless steel flanges with both vacuum gauge and valves included. Min. vacuum pressure achieved by mechanical pump is 5.5 m-torr. ( 5.5x10^-3 torr). The pressure can reach 10^-5 torr by using mechanical + moleculer pump. Leaking rate is < 5 m-torr / min. and stable vacuum pressure after 24 hours is < 2 torr.
Oxygen Monitoring	An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation.
Vacuum Pump	120 L/m Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10^-2torr. Stainless steel hose tube is included for connecting to tube furnace. Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.
Gas Flow Meter and Pressure Meter	Three gas flow-meters (4% accuracy FS) are installed inside the mobile case to enable monitoring of gas flowing rates (three different kinds of gases in total). Compact direct read flow meter, 10-100 cc/min. Compact direct read flow meter, 16-160 cc/min. Compact direct read flow meter, 25-250 cc/min. Four pressure meters are installed inside the mobile cart which are able to monitor three types of flowing gas pressure as well as the pressure of mixing tank.
Valves	Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately